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| 计量光栅制造综述 |
| Summarization about the manufacture of metrologic gratings |
| 修订日期:2003-09-22 |
| DOI: |
| 中文关键词: 计量光栅,光栅制造,光栅检测 |
| 英文关键词:metrologic gratings,manufactacture of gratings,calibration of gratings |
| 基金项目: |
| 汤天瑾 曹向群 林斌 |
| 浙江大学国家光学仪器工程技术研究中心,浙江大学国家光学仪器工程技术研究中心,浙江大学国家光学仪器工程技术研究中心 浙江杭州310027,浙江杭州310027,浙江杭州310027 |
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| 中文摘要: |
| 计量光栅作为一种重要的传感器件,广泛应用于工业生产的诸多领域。系统介绍了计量光栅的种类,重点介绍了国内外光栅制造的主要方法、光栅复制工艺以及衡量光栅质量的基本指标和检测方法。 |
| 英文摘要: |
| As an important kind of sensing element for instruments,metrologic gratings had been widely used in many fields of industrial production.The categories of metrologic gratings are first given,then the paper focuses on the main technique of gratings manufacture home and aboard,the basal indices for the quality evalution of gratings and means of fabrication are also presented elaborately. |
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