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| 激光薄膜缺陷研究 |
| Study on defects in optical thin film |
| 修订日期:2003-11-30 |
| DOI: |
| 中文关键词: 缺陷,光学薄膜,激光损伤,损伤阈值 |
| 英文关键词:defects,optical thin film,laser-induced damage,laser damage threshold |
| 基金项目: |
| 凌秀兰 黄伟 孔明东 张云洞 |
| 中国科学院光电技术研究所,中国科学院光电技术研究所,中国科学院光电技术研究所,中国科学院光电技术研究所 四川成都610209,四川成都610209,四川成都610209,四川成都610209 |
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| 中文摘要: |
| 薄膜缺陷是影响薄膜元件抗激光损伤的重要因素之一,长期以来一直是人们关注和研究的问题。首先介绍了薄膜缺陷的种类、特点及成因。在此基础上,分析了缺陷对激光损伤阈值的影响以及激光预处理对缺陷的影响。最后,对于如何减少缺陷和提高损伤阈值作了讨论。 |
| 英文摘要: |
| Defects in thin film are one of the most important factors influencing laser-induced damage in the thin film components, and always a major concern. Firstly,category, properties and derivation of defects in thin film are introduced . Then, the influence of defects on laser-induced damage and the influence of laser conditioning on defects are analyzed. And finally, the ways to diminish defects and increase laser damage thresholds are also discussed. |
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