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| 大口径光学薄膜透反射率测量方法的研究 |
| Measuring spectral reflectance and transmittance of heavy caliber optical thin-film |
| 修订日期:2003-11-30 |
| DOI: |
| 中文关键词: 大口径,大角度,透射率,反射率,自动测量 |
| 英文关键词:heavy caliber,large angle,transmissivity,reflectivity,automatic measurement, |
| 基金项目: |
| 谢云 刘骏 李海峰 刘旭 顾培夫 |
| 浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室 浙江杭州310027,浙江杭州310027,浙江杭州310027,浙江杭州310027,浙江杭州310027 |
| 摘要点击次数: 2459 |
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| 中文摘要: |
| 设计了大口径光学薄膜透、反射率自动测量系统,该系统能在宽波段、大角度范围内进行自动测量;重点论述了大角度测量厚度较大的样品时机械结构的实现;介绍了系统光路的设计和数据采集部分的实现;分析了测量误差的主要来源,并提出相应的解决办法。 |
| 英文摘要: |
| The automatic measuring system has been designed, which can measure the transmissivity and reflectivity of heavy caliber optical thin-film in wide spectral band and wide angular range. The implementation of the machine structure for measuring thick samples at large angle was discussed emphatically. We also introduced the optical system and the data acquisition module as well. At last, the paper analyzes various measurement errors and gives corresponding solutions. |
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