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| 光学薄膜领域反应磁控溅射技术的进展 |
| Advances in reactive magnetron sputtering (RMS) applied on optical coating |
| 修订日期:2003-11-30 |
| DOI: |
| 中文关键词: 反应磁控溅射,光学薄膜,滤光片 |
| 英文关键词:RMS,optical coating,optical filter |
| 基金项目: |
| 闫宏 赵福庭 |
| 北京电影机械研究所,北京电影机械研究所 北京100026,北京100026 |
| 摘要点击次数: 3170 |
| 全文下载次数: 20 |
| 中文摘要: |
| 光学薄膜领域应用反应磁控溅射技术已有多年,反应磁控溅射对提高薄膜质量及降低工艺成本的作用,已受到业界的重视,正在进入工业生产之中。对光学薄膜领域中反应磁控溅射技术中的相关问题进行了评述,提出了一种可能的方案。 |
| 英文摘要: |
| Reactive magnetron sputtering (RMS) has been applied in the field of optical coating for many years.A lot of attention has been paid by optical coating manufacutures on RMS due to its function of enhancing the quality of optical thin films with lower cost.RMS is now entering industrial production. The paper describes some progress in RMS and shows a possible strategy for rebuild an old-version evaporation coater to a RMS plant. |
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