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| 薄膜滤光片淀积过程实时光学监控系统 |
| In-situ optical monitoring system for thin film filter deposition processes |
| 修订日期:2003-11-30 |
| DOI: |
| 中文关键词: 薄膜滤光片,实时,光学监控,计算机 |
| 英文关键词:thin film filter,in-situ,optical monitoring,computer, |
| 基金项目: |
| 林宇翔 章岳光 顾培夫 唐晋发 |
| 浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室 浙江杭州310027,浙江杭州310027,浙江杭州310027,浙江杭州310027 |
| 摘要点击次数: 2628 |
| 全文下载次数: 15 |
| 中文摘要: |
| 介绍了一种薄膜制造实时光学监控系统,对监控系统的组成及各个模块的功能和工作原理进行分析。系统由计算机对信号进行采集、分析和判断,根据膜层的不同特点采取相应的监控方式,可以对各种规整和非规整膜系进行监控,自动开闭蒸发源挡板。 |
| 英文摘要: |
| An in-situ optical monitoring system for thin film deposition is introduced. The components of the system, functions and working principles of each module are analyzed. The computer samples, analyzes, and estimates the signals. Corresponding monitoring methods are adopted according to different characteristics of layers. The system can be used to monitor both regular and non-regular thin film stacks and switch the shutter automatically. |
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