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| 光开关中静电驱动的微悬臂梁耦合分析 |
| The sequential coupling analysis of a cantilever driving by electrostatic force in an optical switch |
| 修订日期:2002-11-13 |
| DOI: |
| 中文关键词: 悬臂梁,静电力,顺序耦合 |
| 英文关键词:cantilever beam,electrostatic force,sequential coupling, |
| 基金项目:国家自然科学基金项目 ( 5 0 2 75 12 7) |
| 马海阳 王艳华 王明亮 孙道恒 |
厦门大学机电工程系 福建厦门361005
(马海阳,王艳华,王明亮) ,厦门大学机电工程系 福建厦门361005(孙道恒)
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| 摘要点击次数: 2673 |
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| 中文摘要: |
| 采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 ,为微机械传感器的设计提供了有力的分析方法 |
| 英文摘要: |
| In the article a sequence coupling method is used for the analysis of a cantilever beam in an optical switch , which is drived by electrostatic force. From the analysis , the dynamic character of the beam has been gained, that pointing out the influence of air damping. The method is a powerful method for designing sensors of Micro Electronics Mechanical System(MEMS). |
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