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| 极紫外与软X射线非周期多层膜优化设计及初步研制 |
| Optimization design and preliminary fabrication of non-periodic multilayers in EUV and soft X-ray region |
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| DOI： |
| 中文关键词: 软X射线,多层膜,随机数,磁控溅射,反射率 |
| 英文关键词:soft X ray,multilayer film,random number,magnetron sputtering,reflectivity |
| 基金项目:国家自然科学基金资助项目 ( 6 97780 2 6 ) |
| 王占山 |
| 同济大学玻耳固体物理研究所 上海200092 |
| 摘要点击次数: 2110 |
| 全文下载次数: 18 |
| 中文摘要: |
| 以周期膜理论为基础 ,改进了已有的设计方法 ,通过采用随机数的方法 ,发展了一种普适的多层膜设计方法 ,这种方法除可设计一般的周期多层膜 ,更重要的是它可以根据选定评价因子 ,设计不同要求的非周期多层膜。根据实际要求 ,完成了积分反射率最大多层膜、宽带平坦型多层膜、校正光源发射不均匀性多层膜和选波长多层膜等。这些多层膜各有特点 ,可满足不同应用的要求。用磁控溅射方法对一种宽带多层膜进行了制备。最后的 X射线衍射测量和反射率的相对测试表明 ,与周期膜系相比 ,非周期多层膜的带宽展宽 ,反射率积分值增加 ,但峰值反射率略有降低。 |
| 英文摘要: |
| Based on the traditional theory of periodic multilayers,a new method for designing some non periodic multilayers in EUV and soft X ray region was developed using random number.Some design results which have some specific performances were presented in this paper.The multilayers that had broadband and peak reflectivities were fabricated by magnetron sputtering.The performances of those multilayers were tested by using low angle X ray diffraction and qualitative reflectivities measurements.The results demonstrated non periodic multilayers had a broadband and higher integrated reflectivity,but lower peak reflectivity. |
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