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| 光通信用光学薄膜与镀膜设备 |
| Optical Coating and Coating Machine for Optical Communication Application |
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| DOI: |
| 中文关键词: 光学滤光片,IAD(离子辅助蒸镀),DWDM |
| 英文关键词:Optical Filters,IAD,DWDM, |
| 基金项目: |
| 小泉达也 孙大雄 范滨 |
株式会社光驰(OPTORUN) 日本琦玉县川越市350-0801
(小泉达也,孙大雄) ,株式会社光驰(OPTORUN) 日本琦玉县川越市350-0801(范滨)
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| 中文摘要: |
| 阐述了镀制如 1 0 0 GHz、5 0 GHz DWDM滤光片及 GFF滤光片等滤光片的镀膜机必须具备的条件。介绍了本公司研制生产的 NBPF- 2型离子辅助蒸镀镀膜机。 |
| 英文摘要: |
| In this paper,NBPF 2,an ion assisted deposition(IAD) based electron beam(EB)evaporation system has been introduced;some critical requirement for coating deposition system has been discussed.Some special required filters,such as 50GHz DWDM filter,add drop filter and gain flattening filter,which consist of hundreds of layers had been deposited with NBPF 2. |
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