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| 薄膜应力分析及一些测量结果 |
| Stress analysis of thin films and some testing results |
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| DOI: |
| 中文关键词: 热应力,形变,沉积,老化 |
| 英文关键词:thermal stress,deformation,deposition,aging |
| 基金项目: |
| 范瑞瑛 范正修 |
中国科学院上海光学精密机械研究所 上海201800
(范瑞瑛) ,中国科学院上海光学精密机械研究所 上海201800(范正修)
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| 中文摘要: |
| 论述了薄膜应力在强激光薄膜应用中的重要性 ,分析了应力的形成原因及沉积参数、老化条件的关系 ,给出了应力的简单测试方法及部分结果 |
| 英文摘要: |
| The serious influence of stress on high power laser thin films was discussed in this paper. The origination of stress and the correlation between stress and deposition parameters and aging conditions were analyzed. A simple stress testing method and some testing results were presented in the context. |
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