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| 分光棱镜型分振幅光度式偏振测量系统的研究 |
| A Study of Division-of-amplitude Photopolarimetrical System Using Prism Beamsplitter |
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| DOI: |
| 中文关键词: 椭偏参数,表面分析,椭偏分析 |
| 英文关键词:Ellipsometry,Surface Analysis,Elliptical Light Testing., |
| 基金项目: |
| 李力 刘旭 李海峰 |
| 浙江大学现代光学仪器国家重点实验室!杭州310027 |
| 摘要点击次数: 2079 |
| 全文下载次数: 17 |
| 中文摘要: |
| 介绍了分振幅光度式偏振测量原理,并论述我们基于此种原理所建立的分光棱镜型分振幅光度式偏振测量系统的结构、定标和性能校验。文中提出了一种新的定标方法,应用一块位相延迟为非规整值的延迟器代替常规该类系统中使用的λ/4 延迟器,实现了对系统仪器矩阵定标的所有功能。 |
| 英文摘要: |
| The principle of a division of amplitude photopolarimeter introduced by Azzam is described. The construction,calibration and testing of a experimental system based on the above principle are reported. We apply a new calibrating method that uses a retarder of irregular phase retarding value instead of the generally used quarter wave retarder in the polarization state generator and it satisfies all the necessary functions of the calibration quite well. The system has a fast response as it has no moving parts or modulation. |
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