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| 长波红外光学薄膜器件研究 |
| Research of Long-wave Infrared Optical Filters |
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| DOI: |
| 中文关键词: 红外滤光片,膜系设计,监控 |
| 英文关键词:Infrared Filter,Film Design,Monitoring. |
| 基金项目: |
| 朱玲心 张麟 |
| 中科院上海技术物理研究所!上海200083 |
| 摘要点击次数: 2179 |
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| 中文摘要: |
| 论述了长波红外滤光片制备中膜系设计、监控方案设计、工艺条件等主要技术。列举了允差分析在优选膜系、改善膜厚监控中的具体应用。并以长波红外重要高折射率材料碲化铅为例,描述了研究膜层材料特性及确定重要工艺条件—基板温度的试验方法及结果 |
| 英文摘要: |
| This paper discusses the main technology,such as film design,monitoring scheme design and technology condition,in making long wave infrared filters. The specific application of tolerance analysis in selecting film and improving monitoring of film thickness is presented. Taking the sample of PbTe,an important long wave infrared coating material,the paper describes the experimental method and results in studying coating material performance and determining the key technological condition the substrate temperature. |
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