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| 多半波滤光片的过正极值法监控 |
| The Overshut turingpoint Monitoring On Multi cavity Filters |
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| DOI: |
| 中文关键词: 多半波滤光片,膜厚监控,过正极值法,计算机模拟 |
| 英文关键词:Multi filters, Monitoring of Coating Thickness, Overshut turingpoint Method, Computer Simulation., |
| 基金项目: |
| 廖邦俊 费书国 阴晓俊 |
| 沈阳仪器仪表工艺研究所!沈阳110043 |
| 摘要点击次数: 2255 |
| 全文下载次数: 16 |
| 中文摘要: |
| 通过计算机模拟多半波滤光片的膜层控厚过程,分析不同的过正极值方法和过正参数对滤光片光学技术指标和监控成功率的影响。结果表明,过正极值方法有效地抑制了监控信号随机噪声的作用,显著地提高了生产效率。 |
| 英文摘要: |
| A Program was designed to simulate the monitoring of coating thickness during the deposition of the multi cavity filters, Overshut turingpoint method were investigated and the effect of overshut on the optical characters of the filters is evaluated. It was conformed that the overshutturingpoint method repressed the random noise in the monitoring signal and increased greatly the yield of the deposition run. |
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