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| 用离子束溅射法制备长波段X射线多层膜 |
| How to Fabricate X-ray Multilayer Mirrors for Longer Wavelength Using Ionbeam sputtering Deposition |
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| DOI: |
| 中文关键词: 软X射线多层膜,离子束溅射,反射率计 |
| 英文关键词:Soft x ray Multilayer, Ion beam sputtering,Reflectometer. |
| 基金项目: |
| 王国田 马月英 曹健林 |
| 中国科学院长春光学精密机械研究所应用光学国家重点实验室!长春130022 |
| 摘要点击次数: 2023 |
| 全文下载次数: 22 |
| 中文摘要: |
| 叙述了用离子束溅射镀膜机OXFORD进行X射线长波段多层膜实验及制备X射线多层膜光学元件方面的工作。简述离子束溅射镀膜机的工作原理,X射线多层膜的制备过程,主要工艺参数,以及用X射线小角衍射仪对制备样品周期结构的检测和用软X射线反射率计测反射率的部分结果。 |
| 英文摘要: |
| This thesis mainly talk about how to fabricate X ray multilayer mirrors for longer wavelength using ion beam sputtering deposition instrument OXFORD, and we recount the working principle of the ion beam sputtering deposition instrument OXFORD Moreover we show the process of fabricating X ray multilayer mirrors, mainly technological parameters and points for attention. Afterwards we make a verification for the period structure of C/Si sample using X ray diffraction measurement,and measure the reflectance by using reflectometer. |
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