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| 28.4nm和30.4nm波段的C/Si多层膜 |
| C/Si Multilayer Mirrors for 28.4nm and 30.4nm Wavelength |
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| DOI: |
| 中文关键词: X射线光学,多层膜反射镜,离子束溅射 |
| 英文关键词:X ray Optics,Multilayer Mirrors,Ion beam sputtering., |
| 基金项目: |
| 王国田 马月英 曹健林 |
| 中国科学院长春光学精密机械研究所应用光学国家重点实验室!长春130022 |
| 摘要点击次数: 1962 |
| 全文下载次数: 13 |
| 中文摘要: |
| 对于宇宙的探讨,特别是对太阳大气层的研究,需要用X射线、极紫外及远紫外波段望远镜来观测。我们报道了一种新的材料组合C/Si用于28.4nm(43.65eV)和30.4nm (40.78eV)波段的多层膜反射镜,并且用离子束溅射装置制备了正入射条件下的C/Si多层膜反射镜。同时,我们用软X射线反射计测量了其反射率,在正入射条件下测得最大反射率达14% (30.4nm )。 |
| 英文摘要: |
| To investigate the cosmic space,specially,the temperature structers of hot solor,we need X ray and extreme ultraviolet wavelength telescope for observing.We report a new material combination,C/Si,for normal incidence multilayer mirrors in the 28.4nm and 30.4nm wavelength.The multilayers,fabricated by ion beam sputtering deposition,were measured for the period structure by using X ray diffraction measurement and for the reflectance by using reflectometer. |
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