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| 表面微观形貌的显微干涉检测原理及干涉显微镜发展现状 |
| New advances in measurement fundamental of microscopy interferometry & interferometric microscopes for surface microtopography |
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| DOI: |
| 中文关键词: 干涉显微镜,干涉检验,微观形貌 |
| 英文关键词:Interferometric microscope,interferometry test,microtopography. |
| 基金项目:南京理工大学发展基金资助 |
| 高志山 陈进榜 |
| 南京理工大学电光学院!南京210094 |
| 摘要点击次数: 2548 |
| 全文下载次数: 15 |
| 中文摘要: |
| 追踪分析世界上表面微观形貌检测方面显微干涉检测原理的最新进展 ,比较干涉显微镜用于检测表面微观形貌时具有的形式、结构特点 ,分析选型研制干涉显微镜可能遇到的问题及应该研究的方面。 |
| 英文摘要: |
| It is given about new advances in measurement fundamental with interferometric microscopes for surface microtopography in this paper.The virtues and defects are compared with for different type of interferometric microscopes with different configuration.Problems and tendency for future research and development of interferometric microsopes are discussed. |
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