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| InP系波导和光电探测器的单片集成器件制作 |
| The Fabrication of Monolithic Integration of InP Optical Waveguide and Photodetector |
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| DOI: |
| 中文关键词: 光波导,PIN探测器,光电集成电路(OEIC) |
| 英文关键词:Optical Waveguide,PIN Photodetector,OEIC |
| 基金项目: |
| 吕章德 杨易 程宗权 |
| 浙江绍兴文理学院物理系,中科院上海冶金研究所 |
| 摘要点击次数: 2457 |
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| 中文摘要: |
| 报道了应用液相外延(LPE)方法,制作了InP/InGaAsP/InGaAs半导体光波导和InGaAs-PIN光电探测器的单片集成器件,器件性能的几个主要参数与国外的同类器件相近 |
| 英文摘要: |
| The fabrication of monolithic integration of InP/InGaAsP/InGaAs semiconductor optical waveguide and InGaAs PIN photodetector using liquid phase epitaxy(LPE) method is reported. The principal paraneters representing the performance of this device are closed to the level of foreign devices. |
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