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| STM和AFM的研制 |
| Developing Work of STM and AFM |
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| DOI: |
| 中文关键词: STM(扫描隧道显微镜),AFM(原子力显微镜) |
| 英文关键词:STM, AFM. |
| 基金项目: |
| 夏国鑫 黄惠金 |
| 上海光学仪器研究所!上海200093 |
| 摘要点击次数: 2861 |
| 全文下载次数: 18 |
| 中文摘要: |
| 叙述STM(扫描隧道显微镜)和AFM(原子力显微镜)的主要关键技术和研制情况。在研制的STM和AFM样机上,对12001/mm光栅进行测量,得出本样机的测量重复性可达10%以内。对研制的样机进行分析和对比后提出:STM和AFM,尤其是AFM,技术上已趋于成熟;使用上简单、方便,已达到实用化程度,可以作为高级表面粗糙度测量的常用计量仪器。 |
| 英文摘要: |
| This paper introduces some critical technology of the development of STM(Scanning Tunneling Microscope) and AFM (Atomic Force Microscope). On the instrumentof the developing STM and AFM,the 1200 1/mm grating is measured,and we get the reproducibility of these instruments reaching 10%. After comparing and analyzing,we believe thatthey are approximating to maturity in technology on the developments of STM and AFM,especially AFM. Because they are easy to operate,this instrument can be put into practical useas an advanced measurement instrument for surface roughness. |
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