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| 镀膜基板激光测温的自动化 |
| Automation of Measuring the Substrate Temperature by Laser |
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| DOI: |
| 中文关键词: 激光测温,真空镀膜,自动化 |
| 英文关键词:Measuring tile Temperature by Laser,Vacuum Coating,Automation., |
| 基金项目: |
| 马秀芳 费越 |
| 复旦大学!上海200433 |
| 摘要点击次数: 1972 |
| 全文下载次数: 15 |
| 中文摘要: |
| 描写了一种新型的CCD摄像头一计算机系统,它可以在镀膜基板激光测温的过程中跟踪光斑中心,从而测出移过光斑中心的干涉条纹数,达到镀膜基板激光测温自动化的目的。 |
| 英文摘要: |
| The article describes a new CCD camera-computer system,which can track the center of the light spot and count the number of fringes passing the center constantly' So we can measure the substrate temperature by laser automatically' |
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