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| 离子束刻蚀计量光栅的衍射现象 |
| The Diffractive Phenomenon of the Metrologcal Grating Etched by Ion |
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| DOI: |
| 中文关键词: 离子束刻蚀,计量光栅,衍射 |
| 英文关键词:Diffractive, Phenomenon, Metrologcal Grating, |
| 基金项目:现代光学仪器国家重点实验室开放课题 |
| 陈洪璆 林野 曹向群 |
| 浙江大学现代光学仪器国家重点实验室!杭州,310027,浙江大学现代光学仪器国家重点实验室!杭州,310027,浙江大学现代光学仪器国家重点实验室!杭州,310027 |
| 摘要点击次数: 2048 |
| 全文下载次数: 15 |
| 中文摘要: |
| 介绍了计量光栅经离子束刻蚀后的衍射现象,实测了刻蚀表面的形貌特征,还对这种衍射现象进行了讨论。 |
| 英文摘要: |
| This paper introduces and analyses the diffractive phenomenon of the metrologcal grating etched by ion beam,furthermore,it surveys the feature of etched surface of the grating. Physics of the diffractive phenomenon also is discussed. |
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