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| 实时三光束横向剪切干涉仪 |
| The Real-time Three-beam Lateral Shearing Interferometer |
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| DOI: |
| 中文关键词: 实时横向剪切,三光束干涉,位相测量,误差分析 |
| 英文关键词:Real-time Lateral Shearing, Three-beam Interfere, Phase Measuring, Error Consideration, |
| 基金项目: |
| 王金成 黄次芳 |
| 南京师范大学物理系!210097,南京,上海第二光学仪器厂!200062,上海,南京师范大学物理系!210097,南京 |
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| 中文摘要: |
| 对三光束实时横向剪切干涉仪进行了全面深入的分析,导出了其位相测量原理及误差公式。分析表明三光束干涉相叠加产生的信号具有二倍频分量,与通常双光束干涉有根本区别,但是适当地使用这个信号并不会导致测相原理的复杂化,相反,还会降低测量方法的理论误差。 |
| 英文摘要: |
| An analysis is performed to a three-beam real-time lateral shearing interferomter with which its principle of phase measurement and error formula are derived. The analysis shows that the signal includes double-frequency component when three-beam lights interfere. It is very different from the common double-beam interference, but the doublefrequency does not make the calculation of phase measurement complex if used properly,On the contray it decreases the theoretical error. |
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