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| 金刚石红外增透保护膜的研制及特性拟合 |
| Fabrication and Simulation of Diamond Infrared Anti-reflection Protection Thin Films |
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| DOI: |
| 中文关键词: 金刚石红外增透保护薄膜 |
| 英文关键词:Diamond Infrared Anti-reflection Protection Thin Films |
| 基金项目: |
| 褚沉 王辉 |
| 复旦大学物理系!上海,200433,复旦大学物理系!上海,200433,复旦大学物理系!上海,200433,复旦大学物理系!上海,200433,复旦大学物理系!上海,200433 |
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| 中文摘要: |
| 论述了在硅基板上用热灯丝法制备金刚石红外增透保护膜的工艺,通过多灯丝法、预打磨处理以及加偏压等方法得到了特性优良的金刚石薄膜,并利用对金刚石薄膜─硅板体系红外透射率的曲线拟合,推知了一系列不易直接测量的特性参数,如折射率,吸收系数,薄膜厚度等。 |
| 英文摘要: |
| The technology of fabricating diamond infrared anti-reflection protection thin films on St substrates by HF CVD is presented in this paper. Using multifilament, prescrach and adding a bias,we got the diamond thin films with excellent properties. Through the simulation on the transmittance-wavelength curve of our sample,we got a serie of characteristric parameters which are not easy to measure directly,such as refraction index,absorptance and the thickness of the thin film. |
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