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| 光学表面粗糙度研究的进展与方向(续) |
| Recent Development and Direction in Optical Surface Roughness Research |
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| DOI: |
| 中文关键词: 表面粗糙度,轮廓仪,微表面 |
| 英文关键词:Surface Roughness, Profiler, Microsurface |
| 基金项目: |
| 徐德衍 林尊琪 |
| 中科院上海光机所!上海嘉定,201800,中科院上海光机所!上海嘉定,201800 |
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| 中文摘要: |
| 在评述了研究表面粗糙度的重要性和紧迫性基础上,阐述了有关光学表面粗糙度概念的某些在介绍国外几家公司出售的几种典型表面粗糙度测试仪器技术特性的明了国内外这一领域研究的发展方向。最后概略地介绍了关于这一课题我们将要开展的部分工作。 |
| 英文摘要: |
| Importances of developing optical surface roughness in many optical fields areemphasized in this artical. Some basic concept and specifications of noncontact surface profil-ers on several corporations are reviewed in detail. Development direction about surface rough-ness research and our next work is introduced in brief. |
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