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| 精密可控工作台的实验研究 |
| Experimental Research on Precision Controllable Worktable |
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| DOI: |
| 中文关键词: 工作台,光学刻尺,CCD器件,压电晶体 |
| 英文关键词:Worktable, Optical Scale CCD, Piezocrystal |
| 基金项目: |
| 张思祥 杨国光 |
天津大学精密仪器系!300072天津(张思祥) ,浙江大学光科系!310027杭州(杨国光)
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| 中文摘要: |
| 实验探讨和研究了精密可控工作台的位移测量系统,计算机控制系统和微位移系统。实现了传统光学到尺数字化,使具有0.5mm刻度值的标准刻尺达到了1μm的分辨率和2μm的测量精度,并成功地用于精密可控工作台的位移实时测量,具有一定的实用价值。 |
| 英文摘要: |
| In this paper the displacement measuring system,computer control system and microdisplacement system are researched. One micrometer resolution and 2 micrometers measuring standard scale were achieved. The real time displacement measuring of precision controllable worktable was also successfully completed. |
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