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| 微机形成的非球面干涉图 |
| Generating Aspheric Surfaces Interferograms by Micro-computer |
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| DOI: |
| 中文关键词: 测量,干涉图,非球面 |
| 英文关键词:Measurement,Interferogram,Aspherical Surface |
| 基金项目:机电基金委基金 |
| 曹天宁 岑兆丰 |
| 浙江大学,杭州现代光学仪器国家重点实验室!杭州,310027 |
| 摘要点击次数: 2720 |
| 全文下载次数: 16 |
| 中文摘要: |
| 介绍一种新的非球面检测方法。用微机技术,对偏离球面很小的非球面作模拟非球面的干涉,获得理想的非球面干涉图。用模拟的理想干涉图作“样板”,使高次非球面的面形在激光球面干涉仪上进行精确测量成为可能。提供了四种类型小非球面度的高次或二次非球面干涉图。给出了几个在CQG一1型激光球面干涉仪上作出的测量结果。其测量精度约为0.5λ。 |
| 英文摘要: |
| This peper dascribes a new testing method for aspheric surface Using the advanced mi-cro-computer technique,we can get the ideal aspherical interferogram by imitating the real aspheritalinterterence. Taking imitating aspherical intcrferogram as a test-plate,it is possible to test the shapeof a high order aspherital surface with a laser aspheric interferometer. We have now provided fourtypes of aspheric surfaces formulas optimizing for.slight aspherical surfaces. We also give several successful measurement obtained by CQG- 1 laser spherical interferometer. The measurement ac-curacy of this method is about 0. 5. |
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