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| 圆光栅精度及均匀性研究 |
| The Precision and homogenity of Circular Grating |
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| DOI: |
| 中文关键词: 圆光栅,分度误差 |
| 英文关键词:Circular Grating, Dividing Error |
| 基金项目: |
| 陈林 冯伟亭 |
| 华东工业大学!上海,200093,华东工业大学!上海,200093 |
| 摘要点击次数: 2257 |
| 全文下载次数: 16 |
| 中文摘要: |
| 圆光栅已经普遍用于高精度角度仪器作为定位基准,然而要研制得到超高精度圆光栅,必须要精度高,均匀性好,两者缺一不可[1],本文研究达到二者全优。 |
| 英文摘要: |
| This paper introduced the multi -circle dividing method and its properties.Multi-circle dividing method has shown good properties in improving the precision of circu-lar grating. We have done our research on this method. We also present the research result onthc homogeneity of circular grating. By analyzing the cause of inhomogeneity, we give theway to eliminate the homogeneity error of circular grating. Our researches have shown goodprospects in application. |
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