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| 激光双焦干涉球面轮廓仪实时扫描及数据处理系统 |
| The System on Real-time Scanning and Data Treating of the Double Focus Laser Interference Spherical Profilometer |
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| DOI: |
| 中文关键词: 双焦干涉,轮廓仪,实时扫描,数据处理 |
| 英文关键词:Double Focus Interference, Profilometer, Real-tine Scanning, Data Treating |
| 基金项目: |
| 杨甬英 卓永模 徐敏 |
| 浙江大学光科系!杭州,310027,浙江大学光科系!杭州,310027,浙江大学光科系!杭州,310027 |
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| 中文摘要: |
| 介绍了一种双焦干涉球面扫描轮廓仪,该仪器利用计算机及自动控制系统对曲率半径从±5mm~±30mm的球面进行扫描驱动及采样,并将球面轮廊信号通过A/D转换及数据处理后显示打印表面轮廓参数。整个系统功能齐全。 |
| 英文摘要: |
| The double focus interference spherical scanning profjlometer is introduced in this pa-Per. Using computer and its automatic control system,the Ptofilometer can scan the sPhere, the radius of curvature from + 5 millimeter to + 30 millimeter, and take samples. The surface profiles pearneters are disPlayed and Ptinted after A/D conversion and data Processing. All functions of the System is well. The new technique and instrument are entirely suitable for sPherical profiles self-testing. |
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