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| 光学超分辨理论与实用化前景 |
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| DOI: |
| 中文关键词: 衍射极限,超分辨 |
| 英文关键词: |
| 基金项目: |
| 杨国光 |
| 浙江大学光科系 310027 |
| 摘要点击次数: 2590 |
| 全文下载次数: 10 |
| 中文摘要: |
| 论述了超分辨光学的一些新理论,叙述了衍射光栅显微镜、超分辨光学头、超分辨光刻技术以及合成孔径、超微粒干涉等的原理,评价了这些超分辨技术的实用化前景。 |
| 英文摘要: |
| Several recent advances in optical super-resolution systems are described,such as grating-probe microscopy, super-resolution in optical head, improving resolution in photolithography with a phase-shifting mask and synthetic aperture technology. The practical prospects of these methods are evaluatde. |
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