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| 旋转检偏器移相的微分干涉显微镜 |
| A Differential Interference Microscope Using a Rotating Analyzer for Phase Shifts |
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| DOI: |
| 中文关键词: 微分干涉显微术,表面形貌,相移干涉技术 |
| 英文关键词:Differential Interference Microscope, Surface Topography, Phase Shifting Interferometry |
| 基金项目: |
| 高宏 薛实福 |
| 清华大学精密仪器系,清华大学精密仪器系,清华大学精密仪器系,清华大学精密仪器系 100084 北京,100084 北京,100084 北京,100084 北京 |
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| 中文摘要: |
| 提出了一种干涉相位差与检偏器方位角成线性关系的新型微分干涉显微镜,利用相移干涉技术,可定量测量样品的表面形貌及粗糙度参数,系统的垂直和横向分辨率分别为1nm和0.5μm。 |
| 英文摘要: |
| A new type of differential interference microscope has been developed. The phase difference between two interfering beams m the microscope is linear with the azimuth angle of an analyzer. Using PSI(phase shifting interferomerry), the microscope provides quantitative determination of surface topography and surface roughness. The vertical resolution of the instrument is better than 1nm and its lateral resolution is less than 0.5um. |
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